A Lorentz Force Actuated Continuous Deformable Polymer Mirror for Wavefront Control
نویسندگان
چکیده
منابع مشابه
A Lorentz Force Actuated Continuous Deformable Polymer Mirror for Wavefront Control
This paper describes MEMS deformable polymer mirror system for adaptive optics application. This system employs a 4 μm thick SU-8 membrane with a stress balanced double side aluminum coating as a mirror element. Underlying Lorentz actuators are used to control the surface topography of the mirror, enabling optical wavefront correction. Compared to electrostatic, piezoelectric, and thermal actua...
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ژورنال
عنوان ژورنال: Proceedings
سال: 2017
ISSN: 2504-3900
DOI: 10.3390/proceedings1040554